As integrated circuit manufacturing processes advance to advanced nodes, chip feature sizes are reaching the atomic level, placing stringent demands on processing precision, surface quality, and damage control. Traditional chemical mechanical polishing (CMP) and plasma etching suffer from drawbacks such as scratches, subsurface damage, and limited precision, failing to meet the core requirements of advanced logic, memory, and silicon photonics chips. Against this backdrop, ion beam etching, with its atomic-level precision and near-zero damage advantages, has become a key process equipment in post-Moore's Law semiconductor manufacturing.
Ion beam etching, superior to traditional processes, highlights its value.
Traditional plasma etching relies on chemical reactions and ion bombardment to remove materials, while ion beam etching accelerates and neutralizes ions before directly bombarding the wafer surface, relying on physical sputtering to remove materials. The difference in their underlying principles determines the performance gap. Compared to traditional processes, cluster ion beam etching offers nanometer-level precision, better directionality, and near-zero damage processing; it is adaptable to almost all materials, offers greater process flexibility, and can fulfill complex requirements such as localized precision finishing of wafers and etching at arbitrary angles.
Overcoming three major technologies and establishing a firm foothold in innovation
Acme Glaion130 has successfully overcome three major technical challenges in the industry, achieving independent development of key technologies:
Gas cluster ion source technology: Compared with conventional single-cell ion source technology, it has a faster etching rate, better surface quality, and lower process damage; the stability and beam quality of cluster ion sources reach a better level than similar equipment, providing core support for atomic-level etching.
Electrode technology under high-speed motion: It enables precise and rapid positioning of wafers, solves the stability problem under high-speed motion, and ensures processing accuracy.
Dynamic precision control algorithm: Equipped with an in-situ film thickness measurement device, it forms the required etching map and optimizes the stage movement trajectory to achieve local fixed-point precision finishing of the wafer.